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Polar core by hydrolysis microemulsions vinyltriethoxysilane (TEVS) and 3-aminopropyl triethoxysilane (APTES), to prepare four hydrophobic amino photosensitizers -2,9,16,23- zinc phthalocyanine load surface, positively charged silicon dioxide nanoparticles (SiO2 @ ZnPc (NH2) 4). Transmission electron microscopy (TEM), Zetasizer Nano-ZS particle size analyzer (DLS), UV - visible spectrophotometer (UV-Vis) to study and characterize the surface morphology of the nanoparticles, surface charge, solubility and stability.

Polystyrene (PS) microspheres array as a template, the sol - on indium tin oxide (ITO) electrode was prepared silicon dioxide-gel method) ball chamber array, scanning electron microscopy showed that the silicon dioxide spheres prepared cavity highly ordered arrays. The electrochemical results show that the cyclic voltammetry curve ball cavity array of electrochemical characteristics in line with the microelectrode array. Hemoglobin (Hb) as a redox model protein adsorbed directly to the ball cavity to obtain current-hydrogen peroxide biosensor research the Hb direct electrochemistry and electrocatalytic properties on the microelectrode array.

The oxidation process is an important process in integrated circuit process. In this paper, the calculation and the actual measurement of thickness of silicon formed by thermal oxidation were did, and the dry and wet oxygen time, the theoretical value, theactual measured value and error value of six samples were listed, and the experimental results show that process parameters used in this paper can achieve better results.



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