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The deposition parameters, including the ratio of low frequency (LF) power to high frequency (HF) power and the TEOS flow rate, were varied to investigate their effect on the residual stress, the deposition rate, and the etch rate of TEOS silicon dioxide film. Analysis of variance (ANOVA) statistical technique was used to verify that the experimental data are valid rather than coincidences of random sampling. The calculated P-values of the deposition parameters verify that the ratio of LF/HF power and the TEOS flow rate significantly affect the residual stress and the etch rate of the films. For the deposition rate, only the TEOS flow rate has a significant effect. The difference in the intrinsic and thermal stresses of TEOS silicon dioxide films co-deposited on the silicon and stainless steel wafers are presented and discussed. TEOS silicon dioxide films are electrically characterized at elevated temperatures (up to 300 °C) using metal-insulator-metal (MIM) capacitors. The characterizations show that capacitance decreases with increasing temperature, as well as with the process thermal budget (temperature × time). Here the discusses about the relationships between the deposition parameters and properties of thick (e.g., 5 μm) tetraethylorthosilicate (TEOS) silicon dioxide films deposited on silicon wafers using a dual-frequency plasma-enhanced chemical vapor deposition (PECVD) system. 

Shih-Shian Ho received his B.S. and M.S. degrees in Mechanical Engineering from National Taipei University of Technology and National Central University.Here he repotred about 5 μm-thick TEOS silicon dioxide films were developed for MEMS devices. he received his Ph.D. in Materials Science and Engineering from Case Western Reserve University. From 2003 to 2004, he was an engineer in Industrial Technology Research Institute, Taiwan where he held a PI position to manage Frontier Innovation Project: Ductile-mode Fabrication Process of Lithium Niobate Hybrid Wafer. In 2004, he joined Carnegie Institution of Washington to synthetically grow the biggest ever single-crystal diamond (>10 carats; IIa quality). His research pursues innovation in media-compatible sensors and actuators for harsh environment applications by combining design and modeling, materials and fabrication, and testing and packaging.

Silicon dioxide films show a good performance: the capacitance of metal-insulator-metal capacitor was studies up to 300 °C,The MIM capacitor exhibits a negative TCC of ?6–?10 PPM/°C from room temperature to 300 °C. Research by Mehran Mehregany, he received his Ph.D. in Electrical Engineering from Massachusetts Institute of Technology in 1990, when he joined Case Western Reserve University. Mehregany—on behalf of Case Western Reserve University—founded the Case School of Engineering San Diego in July 2007, and its Wireless Health and Wearable Computing programs in 2011 and 2014, respectively. He is the Director of Case School of Engineering San Diego and Goodrich Professor of Engineering Innovation. He is a faculty of the Electrical Engineering and Computer Science Department, with a secondary appointment in the Biomedical Engineering Department. Previously, he was a consultant to the Robotic Systems Research Department at AT&T Bell Laboratories (1986–1990), where he was a key contributor to groundbreaking research in microelectromechanical systems (MEMS). From November 2009 through August 2010 (taking a leave from Case), Mehregany was the founding Executive Vice President of Engineering, Chief of Engineering Research, and the Gary and Mary West Endowed Chair of Wireless Health Technology at the West Health Institute (fka, West Wireless Health Institute. During this period, he formulated the Institute's engineering program, recruited the initial talent and launched the initial research activities and product developments, including Sense4Baby, which is being commercialized. Mehregany is well known for his research in the area of sensors, MEMS and silicon carbide. He has over 360 publications describing his work, holds 20 U.S. patents, is the recipient of a number of awards/honors and has founded several technology startups. His research interests are sensors, micro/nano-electro-mechanical systems, silicon carbide technology and microsystems, wearables and wireless health.


 

 

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